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Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat

Overview of attention for article published in Nature Nanotechnology, March 2017
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About this Attention Score

  • In the top 5% of all research outputs scored by Altmetric
  • High Attention Score compared to outputs of the same age (98th percentile)
  • High Attention Score compared to outputs of the same age and source (94th percentile)

Mentioned by

news
21 news outlets
blogs
3 blogs
twitter
12 tweeters
wikipedia
1 Wikipedia page

Readers on

mendeley
77 Mendeley
Title
Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat
Published in
Nature Nanotechnology, March 2017
DOI 10.1038/nnano.2017.34
Pubmed ID
Authors

Hyo Seon Suh, Do Han Kim, Priya Moni, Shisheng Xiong, Leonidas E. Ocola, Nestor J. Zaluzec, Karen K. Gleason, Paul F. Nealey

Abstract

Directed self-assembly (DSA) of the domain structure in block copolymer (BCP) thin films is a promising approach for sub-10-nm surface patterning. DSA requires the control of interfacial properties on both interfaces of a BCP film to induce the formation of domains that traverse the entire film with a perpendicular orientation. Here we show a methodology to control the interfacial properties of BCP films that uses a polymer topcoat deposited by initiated chemical vapour deposition (iCVD). The iCVD topcoat forms a crosslinked network that grafts to and immobilizes BCP chains to create an interface that is equally attractive to both blocks of the underlying copolymer. The topcoat, in conjunction with a chemically patterned substrate, directs the assembly of the grating structures in BCP films with a half-pitch dimension of 9.3 nm. As the iCVD topcoat can be as thin as 7 nm, it is amenable to pattern transfer without removal. The ease of vapour-phase deposition, applicability to high-resolution BCP systems and integration with pattern-transfer schemes are attractive properties of iCVD topcoats for industrial applications.

Twitter Demographics

The data shown below were collected from the profiles of 12 tweeters who shared this research output. Click here to find out more about how the information was compiled.

Mendeley readers

The data shown below were compiled from readership statistics for 77 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
France 1 1%
China 1 1%
United States 1 1%
Unknown 74 96%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 33 43%
Student > Master 14 18%
Researcher 10 13%
Student > Doctoral Student 7 9%
Student > Bachelor 4 5%
Other 9 12%
Readers by discipline Count As %
Materials Science 20 26%
Chemistry 19 25%
Engineering 11 14%
Chemical Engineering 9 12%
Physics and Astronomy 7 9%
Other 11 14%

Attention Score in Context

This research output has an Altmetric Attention Score of 180. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 12 July 2017.
All research outputs
#56,390
of 11,492,774 outputs
Outputs from Nature Nanotechnology
#56
of 2,357 outputs
Outputs of similar age
#3,505
of 263,499 outputs
Outputs of similar age from Nature Nanotechnology
#4
of 67 outputs
Altmetric has tracked 11,492,774 research outputs across all sources so far. Compared to these this one has done particularly well and is in the 99th percentile: it's in the top 5% of all research outputs ever tracked by Altmetric.
So far Altmetric has tracked 2,357 research outputs from this source. They typically receive a lot more attention than average, with a mean Attention Score of 30.1. This one has done particularly well, scoring higher than 97% of its peers.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 263,499 tracked outputs that were published within six weeks on either side of this one in any source. This one has done particularly well, scoring higher than 98% of its contemporaries.
We're also able to compare this research output to 67 others from the same source and published within six weeks on either side of this one. This one has done particularly well, scoring higher than 94% of its contemporaries.