| Title |
Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat
|
|---|---|
| Published in |
Nature Nanotechnology, March 2017
|
| DOI | 10.1038/nnano.2017.34 |
| Pubmed ID | |
| Authors |
Hyo Seon Suh, Do Han Kim, Priya Moni, Shisheng Xiong, Leonidas E. Ocola, Nestor J. Zaluzec, Karen K. Gleason, Paul F. Nealey |
| Abstract |
Directed self-assembly (DSA) of the domain structure in block copolymer (BCP) thin films is a promising approach for sub-10-nm surface patterning. DSA requires the control of interfacial properties on both interfaces of a BCP film to induce the formation of domains that traverse the entire film with a perpendicular orientation. Here we show a methodology to control the interfacial properties of BCP films that uses a polymer topcoat deposited by initiated chemical vapour deposition (iCVD). The iCVD topcoat forms a crosslinked network that grafts to and immobilizes BCP chains to create an interface that is equally attractive to both blocks of the underlying copolymer. The topcoat, in conjunction with a chemically patterned substrate, directs the assembly of the grating structures in BCP films with a half-pitch dimension of 9.3 nm. As the iCVD topcoat can be as thin as 7 nm, it is amenable to pattern transfer without removal. The ease of vapour-phase deposition, applicability to high-resolution BCP systems and integration with pattern-transfer schemes are attractive properties of iCVD topcoats for industrial applications. |
X Demographics
The data shown below were collected from the profiles of 10 X users who shared this research output. Click here to find out more about how the information was compiled.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Ireland | 3 | 30% |
| United States | 2 | 20% |
| Russia | 1 | 10% |
| Turkey | 1 | 10% |
| Netherlands | 1 | 10% |
| Unknown | 2 | 20% |
Demographic breakdown
| Type | Count | As % |
|---|---|---|
| Members of the public | 5 | 50% |
| Scientists | 4 | 40% |
| Science communicators (journalists, bloggers, editors) | 1 | 10% |
Mendeley readers
The data shown below were compiled from readership statistics for 171 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| United States | 1 | <1% |
| China | 1 | <1% |
| France | 1 | <1% |
| Unknown | 168 | 98% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Ph. D. Student | 58 | 34% |
| Researcher | 28 | 16% |
| Student > Master | 17 | 10% |
| Student > Bachelor | 10 | 6% |
| Student > Doctoral Student | 8 | 5% |
| Other | 23 | 13% |
| Unknown | 27 | 16% |
| Readers by discipline | Count | As % |
|---|---|---|
| Materials Science | 42 | 25% |
| Chemistry | 33 | 19% |
| Engineering | 21 | 12% |
| Chemical Engineering | 18 | 11% |
| Physics and Astronomy | 13 | 8% |
| Other | 11 | 6% |
| Unknown | 33 | 19% |
Attention Score in Context
This research output has an Altmetric Attention Score of 186. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 05 July 2023.
All research outputs
#218,646
of 25,837,817 outputs
Outputs from Nature Nanotechnology
#134
of 3,770 outputs
Outputs of similar age
#4,584
of 324,993 outputs
Outputs of similar age from Nature Nanotechnology
#5
of 66 outputs
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